KLA-Tencor Surfscan 6200 (SFS 6200) - $89,800 - (San Francisco, CA)
KLA-Tencor Surfscan 6200 (SFS 6200) Wafer Surface Contamination Analysis System The SFS 6200 tool is used for wafer surface contamination analysis of unpatterned semiconductor wafers. Condition: Refurbished, Operational, Calibrated & Tested Warranty: 90 Days Country of origin: USA Manufacturer: KLA-Tencor Specifications • Substrate Sizes: 100mm, 125mm, 150mm, 200mm wafers • Substrate Material: Silicon or any opaque, polished surface which scatters less than 5% of incident light. • Defect Sensitivity: 0.09µm diameter PSL sphere equivalent with greater than 80% capture rate. • Haze Sensitivity: 0.02ppm • Haze Resolution: 0.002ppm • Repeatability: 0.5% at 1s (mean count greater than 500, 0.364 µm diameter latex spheres) • Accuracy: =99% (verified with VLSI Standards) • Dynamic Range: 0.09µm to 9,999µm in a single measurement. • Throughput: Up to 150 w/hr using 150mm wafers • Cassette Handling: Single puck wafer handling from two cassette (one sender/receiver, one receiver) • Illumination Source: 30mW Argon-Ion laser, 488nm wavelength • Operator Interface: New LCD monitor, keyboard, mouse • Color coded defect maps, histograms, magnified views of individual defects. • Operation System and Software: Windows 98, ver. 4.2 • Manual Quality Control • The SFS 6200 is calibrated and tested to verify compliance to original specifications. Physical Characteristics • Instrument Dimensions: Height: 168 cm (66”) Width: 75 cm (29.5”) Depth: 77 cm (30.25”) • Instrument Weight: 240 kg (530 lbs) • Crate Dimensions: Height 196 cm (77”) Width: 112 cm (44”) Depth: 122 cm (48”) • Crate Weight: 460 kg (1010 lbs) Installation Requirements • Vacuum: 508 mm (20 in.) Hg • Electrical: 220-240V, 50/60 Hz • Power Requirement: 2 kVA • Ducted Venting: Two 102 mm (4”) exhaust hoses • Environment: Class 10 or better Purchase: To purchase, please click the “Buy It Now” button. Follow to the next page for payment instructions. Pay…
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From ebay.com - 1 month ago